Experiments were performed to compare the out-of-plane sensor system, consisting of the out-of-plane MEMS sensor and its amplifier, to a commercial piezoelectric sensor. Initial experiments revealed that the out-of-plane sensor system was significantly less sensitive than the commercial sensor. A new low-noise amplifier increased the sensitivity of the out-of-plane sensor system. Additional comparison tests between the out-of-plane sensor system and the commercial sensor were performed.Fit parameters:/o = 150 kHz, Q = 5.9 67 Figure 33: Data from a typical admittance test on an in-plane sensor 70 Figure 34: ... sensor and (b) profile of fingers 76 Figure 40: Equivalent circuit of MEMS sensor 78 Figure 41: Circuit diagram of the anbsp;...
|Title||:||A Multi-axis Capacitive MEMS Sensor System for Acoustic Emission Sensing|
|Publisher||:||ProQuest - 2009|