Computational Lithography

Computational Lithography

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The optimization problem can be formulated as following [53]: (4.1) where is the vector of variables, which depends on certain characteristics of ... In contrast, in the discrete optimization problem, belongs to a finite discrete set [15, 52, 56, 88].

Title:Computational Lithography
Author:Xu Ma, Gonzalo R. Arce
Publisher:John Wiley & Sons - 2011-01-06


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