Electron-Beam Interactions with Solids

Electron-Beam Interactions with Solids

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The interaction of electron beams with solid targets has been studied since the early part of the last century. Present interest is spurred on by the fundamental role played by the electron-solid interaction in - among other areas - scanning electron microscopy, electron-probe microanalysis and Auger electron spectroscopy. This book aims to investigate selected aspects of the interaction of electrons with matter (backscattering coefficient for bulk targets, absorption, backscattering and transmission for supported and unsupported thin films, implantation profiles, secondary electron emission and so on); to study the probabilistic laws of interaction of the individual electrons with the atoms (elastic and inelastic cross sections); to introduce the Monte Carlo method and its use for computing the macroscopic characteristics of the interaction processes. Each chapter compares theory, simulations and experimental data.Application of the Monte Carlo Method to Electron Scattering Problems Maurizio Dapor. 3.4 a—b 2.2 a—b a—b a—b a—b a—b a—b a—b a—b a—b a—b a—b a—b a€ca€c a€c a€c a€c a€c a€c a€c 3.2 1.8 2 0 500 1000 1500 2000 E0 (eV) m(E0) 1.4 1.6 Fig. 6.12. Sickafus index m for secondary-electronanbsp;...

Title:Electron-Beam Interactions with Solids
Author:Maurizio Dapor
Publisher:Springer Science & Business Media - 2003-04-23


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