Handbook of Ellipsometry

Handbook of Ellipsometry

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The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry.Progress in the automation of ellipsometric instrumentation began in the early 1960s and continued through the 1970s, with powerful automatic instruments and software becoming available commercially soon thereafter ... Without automation, manual instruments could be used to collect only a relatively small number of (y, I”) pairs versus wavelength (not the 100 pairs possible with automatic instruments)anbsp;...

Title:Handbook of Ellipsometry
Author:Harland Tompkins, Eugene A Irene
Publisher:William Andrew - 2005-01-06


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