Handbook of Ion Sources

Handbook of Ion Sources

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The Handbook of Ion Sources delivers the data needed for daily work with ion sources. It also gives information for the selection of a suitable ion source and ion production method for a specific application. The Handbook concentrates on practical aspects and introduces the principle function of ion sources. The basic plasma parameters are defined and discussed. The working principles of various ion sources are explained, and examples of each type of ion source are presented with their operational data. Tables of ion current for various elements and charge states summarize the performance of different ion sources. The problems related to the production of ions of non-gaseous elements are detailed, and data on useful materials for evaporation and ion source construction are summarized. Additional chapters are dedicated to extraction and beam formation, ion beam diagnosis, ion source electronics, and computer codes for extraction, acceleration, and beam transport. Emittance and brilliance are described and space charge effects and neutralization discussed. Various methods for the measurement of current, profile, emittance, and time structure are presented and compared. Intensity limits for these methods are provided for different ion energies. Typical problems related to the operation of ion source plasmas are discussed and practical examples of circuits are given. The influence of high voltage on ion source electronics and possibilities for circuit protection are covered. The generation of microwaves and various microwave equipment are described and special problems related to microwave operation are summarized. The Handbook of Ion Sources is a valuable reference on the subject, of benefit to practitioners and graduate students interested in accelerators, ion implantation, and ion beam techniques.1 Metal Ions Microwave ion sources run well with oxygen and corrosive gases. ... Evaporation is less suited because the deposition of metallic films can destroy the microwave window or reflect the incoming microwaves. ... parts of which are filled with boron nitride as dielectric so that the microwave power is concentrated in the gas-filled part close to the extraction slit. ... Ga 1.8 GaCl3 Ge 2 GeS As 10 AsH3 15 As Sb 3.1 Sb Hf 2 HfCl4 1 H: ^- Tunning stub M.-wave input n =4 , Chapter 3.

Title:Handbook of Ion Sources
Author:Bernhard Wolf
Publisher:CRC Press - 1995-08-31


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