High Purity Silicon VI

High Purity Silicon VI

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Ultrasonic vibrations were excited into standard 8aquot; wafers using an external ultrasonic transducer and their amplitude recorded in a ... Residual elastic stress can also be harmful for silicon substrates, especially with scaling of a wafer diameter up to 12. ... EXPERIMENTAL Ultrasonic vibrations were generated into single-side polished Cz-Si wafers 660 Electrochemical Society Proceedings Volume 2000-17.

Title:High Purity Silicon VI
Author:Cor L. Claeys
Publisher:The Electrochemical Society - 2000-01-01


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