Introduction to Microelectromechanical Systems Engineering

Introduction to Microelectromechanical Systems Engineering

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Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.[7] describes the fabrication of silicon nozzles and their application for inkjet printing. The Ford Motor Company experimented in the 1980s with micromachined nozzles for engine fuel injection. ... The fabrication is complete with the 3. Mask front side 4. Anisotropic etch Figure 4.3 Schematic Passive Micromachined Mechanical Structures 85 Passive Micromachined Mechanical Structures Fluid Nozzles.

Title:Introduction to Microelectromechanical Systems Engineering
Author:Nadim Maluf, Kirt Williams
Publisher:Artech House - 2004-01-01


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