Introduction to Microsystem Design

Introduction to Microsystem Design

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The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems. For quick reference equations are presented in tables which are found in an index at the end of this book.A volume flow FF is generated by a voltage U applied to a capillary filled with a polar liquid such as water. ... (430) The pressure difference DpEOF driving the fluid as a function of the voltage is calculated with (214) (page 124): ... as a simplified schematic equivalent circuit which shows the electric and fluidic circuit combined and sometimes allows an easier understanding of the interrelationships (cf. Fig.

Title:Introduction to Microsystem Design
Author:Werner Karl Schomburg
Publisher:Springer Science & Business Media - 2011-05-30


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