Plasma-Aided Nanofabrication

Plasma-Aided Nanofabrication

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... microstructuring of semiconductor wafers in microelectronic manufacturing; deposition of various coatings, protective, ... fusion reactions when lighter elements fuse together and release nuclear energy E according to the famous Einsteina#39;sanbsp;...

Title:Plasma-Aided Nanofabrication
Author:Ken Ostrikov, Shuyan Xu
Publisher:John Wiley & Sons - 2007-09-24


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