However, it was also reported that a 700 AdC anneal of the cathode layer was required; the use of this high temperature precludes the use of many substrates and is not compatible with silicon ... EXPERIMENTAL Three-inch lithium cobalt oxide (LiCo02) sputter targets were prepared by cold pressing and ... The growth chamber was a custom-designed turbo-pumped 3-position RF planar magnetron sputter system ... Nominal target power was 100 W, giving a power density of 2.2 W/cm2.
|Title||:||Power Sources for the New Millennium|
|Author||:||M. A. Ryan|
|Publisher||:||The Electrochemical Society - 2001-01-01|