60Ad the RSFs derived from Spin-Coat samples and from traditional ion implanted reference samples were identical for Na, Al and K . ... sigma is the measurement one standard deviation (short and long term variability included) , UCL is the upper control limit and LCL is the lower control limit for the ... M. Hourai , T. Naritorai, Y. Oka, K. Murakami, Electrochemical Society Proceedings Volume 95-20 505.
|Title||:||Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing|
|Author||:||Richard E. Novak, Jerzy Rużyłło|
|Publisher||:||The Electrochemical Society - 1996-01-01|