References.  W. C. Holton et al., Japanese Technology Evaluation Program Panel Report on CIM and CAD for the Semiconductor Industry in ...  E. Sachs, S. Ha, A. Hu, A. Ingolfsson and R. Guo, aRun by Run Process Control, a Talk given at 1990 ...  M. L. Heytens and R. S. Nikhil, aGESTALT: An expressive database programming system, a ACM SIGMOD Record, vol. ...  M. R. Stonebraker, E. Hanson and C. H. Hong, aThe Design of the POSTGRES Rules System, a IEEE Conf.
|Title||:||Process-flow Specification and Dynamic Run Modifications for Semiconductor Manufacturing|
|Author||:||Christopher James Hegarty|