Radio-Frequency Capacitive Discharges

Radio-Frequency Capacitive Discharges

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The first publication of its kind in the field, this book describes comprehensively and systematically radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. Text presents the physics underlying rf discharges along with techniques for obtaining such discharges, experimental methods and results, and theoretical and numerical modeling findings. Radio-Frequency Capacitive Discharges is written by well-known specialists in the field, authors of many theoretical and experimental works. They provide simple and clear discussions of complicated physical phenomena. A complete review on the state of the art is included. This interesting new book can be used as a textbook for students and postgraduates and as a comprehensive guidebook by of the longitudinal structure of cathode regions in a dc glow discharge [4.24- 4.26]. ... In schematic diagrams, the generator or the connection point of a supply are simply marked with a conventional ... A cm~2 and discharge volumes up to 103 cm3 require powerful RF sources from several units to a hundred kilowatts.

Title:Radio-Frequency Capacitive Discharges
Author:Yuri P. Raizer, Mikhail N. Shneider, Nikolai A. Yatsenko
Publisher:CRC Press - 1995-02-24


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