Science and Technology of Integrated Ferroelectrics

Science and Technology of Integrated Ferroelectrics

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The aim of this book is to present in one volume some of the most significant developments that have taken place in the field of integrated ferroelectrics during the last decade of the twentieth century. The book begins with a comprehensive introduction to integrated ferroelectrics and follows with fifty-three papers selected by Carlos Paz de Araujo, Orlando Auciello, Ramamoorthy Ramesh, and George W. Taylor. These fifty-three papers were selected from more than one thousand papers published over the last eleven years in the proceedings of the International Symposia on Integrated Ferroelectrics (ISIF). These papers were chosen on the basis that they (a) give a broad view of the advances that have been made and (b) indicate the future direction of research and technological development. Readers who wish for a more in-depth treatment of the subject are encouraged to refer to volumes 1 to 27 of Integrated Ferroelectrics, the main publication vehicle for papers in this field.Both the piezoelectric and pyroelectric effects in thin films of lend zirconale titanale (Pb(Zr, Ti, , )O3) and lend litanate (PbTiO3) have been used for physical force sensing (pressure sensor), thermal heat sensing (pyroelectric infrared detector) and microactuation (mechanical positioner). ... thin films, 2) surf ace - machined micromechanical structures and 3) n-well CMOS integrated circuit teclmologies.

Title:Science and Technology of Integrated Ferroelectrics
Author:Carlos Pazde-Araujo, Ramamoorthy Ramesh, George W Taylor
Publisher:CRC Press - 2001-01-11


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