Semiconductor Manufacturing Handbook

Semiconductor Manufacturing Handbook

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This handbook will provide engineers with the principles, applications, and solutions needed to design and manage semiconductor manufacturing operations. Consolidating the many complex fields of semiconductor fundamentals and manufacturing into one volume by deploying a team of world class specialists, it allows the quick look up of specific manufacturing reference data across many subdisciplines.... a€œObservations on the hexagonal form of MoSi/sub 2/ and WSi/sub 2/ films produced by ion implantation and on related snowplow effects, a€ J. Appl. Phys., Vol. ... Massalski, T. B., Binary Alloy Phase Diagrams, 2d ed., Vol. 1a€“3, ASM, 1990. Tu, K. N., W. K. Chu, and J. W. Mayer, a€œStructure and growth kinetics of Ni/ sub 2/Si on silicon, a€ Thin Solid Films, Vol. ... Tang, Q., et al., a€œTwinning in TiSi/sub 2/-island catalyzed Si nanowires grown by gas-source molecular-beam epitaxy, a€ Appl. Phys.

Title:Semiconductor Manufacturing Handbook
Author:Hwaiyu Geng
Publisher:McGraw Hill Professional - 2005-04-27


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