... Isobe, Annaka-Shi, Gunma-ken 379-01, Japan 3) SEH America, Inc., 4111 Northeast 1 12th Avenue, Vancouver, WA 98682-6776. ... (LSTDs) (4) are typical these grown-in defects detected in standard CZ silicon crystals grown at a rate higher than -1.0 mm/min. ... It is hoped that the methodology which we developed could be very useful for the Electrochemical Society Proceedings Volume 98-1 1593.
|Title||:||Silicon materials science and technology|
|Publisher||:||The Electrochemical Society -|